Ellipsometry

is an optical technique for measuring the thickness of very thin films (a few tens or hundreds of atoms deep). The technique is used extensively in the microelectronics industry. Harland has used ellipsometry off and on (along with other techniques) to study thin layers since 1972.

We shine the light on our sample and study what the sample did to the light. From this, we draw conclusions (thickness, microstructure, etc.) about the sample.

The reason that this is on our webpage is:

• Harland teaches a class for the American Vacuum Society from time to time on the subject of Ellipsometry.
• The textbook used for this class is "Spectroscopic Ellipsometry and Reflectometry: A User's Guide", by H. G. Tompkins and W. A. McGahan, John Wiley & Sons, New York (1999). The book covers not only ellipsometry, but a related technique, reflectometry.
• A previous book which covers single-wavelength ellipsometry is "A User's Guide to Ellipsometry", by H.G. Tompkins, Academic Press, New York (1993).
  

The J.A. Woollam Co. manufactures ellipsometer instruments, and Harland helps (as a consultant) to train some of their customers in the optimal use of the instrument.

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