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TIFFANY ASSOCIATES |
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Serving California Electronics Markets Since 1983 |
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Tiffany Associates Mission Viejo, CA 92692 |
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Semiconductor Equipment Sales | Our Suppliers | Design Verification | Quality—Reliability | Failure Analysis | IC Production Test | Trade Show Schedule | New Product Announcement | More NEW Products! |
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Memsstar® is focused on sacrificial & release etch and deposition technologies for MEMS applications Our mission is to enable our customers to make the successful transition to integrated dry processing, and from R&D to high yield manufacturing of their MEMS technologies. By delivering proprietary process tools and unique process integration knowledge to our customers, we add value to your efforts to develop and manufacture high performance and cost effective MEMS devices. The patented Memsstar® CCFT™ processing and control systems are used to create truly unique and cost effective solutions for vapor phase isotropic etch and surface modification. |
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MEMS FABRICATION TOOLS |
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CONTROLLED CONTINUOUS FLOW TECHNOLOGY memsstar® systems have unrivalled process performance and process control, versus other vapour phase or liquid based systems. It is used for chemical etch and chemical deposition processes. Benefits of CCFT™ are many and include the following; · Faster process times, highly efficient gas usage, lower COO · Faster etch rates, higher throughput · Multi-mode, static, pulsed, or flow · Large process windows for development and multiple schemes · Excellent process uniformity, etch selectivity, repeatability · Robust Films with superior tunable properties · Multi-step processing in a single pass Product & Applications Brochures · An overview of release etching · The need for MEMS process integration · Process control - an essential requirement for MEMS etching and deposition · How memsstar systems can be configured, expanded and integrated for R&D through to production fabs Conference Paper · System for MEMS Manufacturing,Semicon, Dr A.O'Hara Surface Modification - white paper |